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I have purchased a site in bilekahalli village in 1994. owner has not given any type of mother deed related to the land. Without approaching the owner (as their will be chances of legal issues) ,please can anyone guide me how to get the mother deed based on survey number only, (can i apply in subregister office under RTI). Also what are the necessary revenue documents i should collect related to a site.

yes, in your sale deed it will be mentioned previous document, book number, year of past registered document.
get the copy of that sale deed. Again in the old sale deed, there will be reference of its old sale deed.
so you can keep getting copy of sale deed till you need or available.
in Sub-Reg office you need to apply for certified copy, might cost 200-500rs